150mm wafer processing

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150mm wafer processing is the processing of 150mm wafers to create microelectronic machines. 150mm wafers are also known roughly as 6-inch wafers.

6-inch wafer fabs may occupy a sweet spot between the smaller 3 inch and 4 inch production process and the larger 200mm and 300mm process.

The company Coherent is related to 6-inch wafer processing.[1]

The smaller 4-inch processing is also known as 100mm wafer processing.

Equipment for 150mm wafer processing[edit]

  • 150mm wafer shippers
  • Entegris 182 series

References[edit]