EVG 101

From XVRWiki
Jump to navigation Jump to search

The EVG 101 is a photoresist spray coater from EVG.[1][2][3]

References[edit]

  1. ↑ "EVG 101 Spray Coater (evgspraycoat)". https://snfguide.stanford.edu/guide/equipment/evg-101-spray-coater-evgspraycoat.
  2. ↑ "EVG101". https://www.evgroup.com/products/lithography/resist-processing-systems/evg101.
  3. ↑ "EVG 101 Brochure". https://www.findlight.net/uploads/products/datasheet/EVG101-Advanced-Resist-Processing-System.pdf.
Retrieved from "http://www.xvrwiki.org/index.php?title=EVG_101&oldid=120259"